Non-Equilibrium Plasma Models
VibrKin reactors are designed for simulating the processes in non-equilibrium plasma (including radiating and chemically active plasma) under an impact of impulse or stationary gas discharges.
The electron energy distribution function (EEDF), on the basis of which the rate constants of the electron stimulating processes in non-equilibrium plasma are calculated, are taken into account in the simulations. In addition, the non-equilibrium vibration distribution function (VDF), as well as the flow of radiation quantum from the plasma, is also considered in the given model.
The following ways to set the field and current in the plasma reactors are realized:
• Current is given
• L-C-R circuit is given
• E/N (the reduced field) is given
• U-L-C-R circuit is given
• V-R parameters are given
There is a set of 0D models and one 1D model both in Gas Phase reactors, and in Heterogeneous ones. The 0D models for modeling of nonequilibrium plasma processes are actually 0D+ models, since they include an effective diffusion term taking into account diffusion-controlled processes of charge and excited particles destruction on the walls.
0D Gas Phase and Heterogeneous Models
Set of 0D models are designed for different discharge type's simulations (pulse discharge, glow discharge, arc discharge). These models can solve the problems like plasma layer depositions (PLD), plasma etching, plasma deposition of coatings, films grow, light sources.
1D cylindrical geometry Gas Phase and Heterogeneous models.
This model takes into account radial nonuniformity of species and EEDF. Diffusion of species can be modeled in different approaches including ambipolar diffusion. This model can effectively solve the problems involving contracted discharges and discharges in electronegative gases.
Gas Phase Models
This is a set of 0D models for modeling of nonequilibrium plasma processes in gas phase taking into account diffusion-control processes charge and excited particles destruction on the walls.
Heterogeneous Models
There are set of 0D and 1D models which along with nonequilibrium plasma processes taking into account processes of plasma-surface interaction including the impact of exited particles on surface.